The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Feb. 17, 2011
Applicants:
Christian Dussarrat, Tokyo, JP;
François Doniat, Greenville, DE (US);
Curtis Anderson, Downingtown, PA (US);
James J. F. Mcandrew, Chadds Ford, PA (US);
Inventors:
Christian Dussarrat, Tokyo, JP;
François Doniat, Greenville, DE (US);
Curtis Anderson, Downingtown, PA (US);
James J. F. McAndrew, Chadds Ford, PA (US);
Assignee:
American Air Liquide, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); C23C 16/44 (2006.01); C23C 16/40 (2006.01); H01L 21/02 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02126 (2013.01); C23C 16/401 (2013.01); C23C 16/30 (2013.01); H01L 21/02274 (2013.01); C23C 16/56 (2013.01); H01L 21/02203 (2013.01); H01L 21/02211 (2013.01); H01L 21/02214 (2013.01);
Abstract
Disclosed are precursors that are adapted to deposit SiCOH films with dielectric constant and Young's Modulus suitable for future generation dielectric films.