The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Apr. 15, 2009
Johannes Hubertus Josephina Moors, Helmond, NL;
Bastiaan Theodoor Wolschrijn, Abcoude, NL;
Dirk Heinrich Ehm, Lauchheim, DE;
Johannes Hubertus Josephina Moors, Helmond, NL;
Bastiaan Theodoor Wolschrijn, Abcoude, NL;
Dirk Heinrich Ehm, Lauchheim, DE;
ASML Netherlands B.V., Veldhoven, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A lithographic apparatus includes a projection system constructed and arranged to project a beam of radiation onto a target portion of a substrate, an internal sensor having a sensing surface, and a mini-reactor movable with respect to the sensor. The mini-reactor includes an inlet for a hydrogen containing gas, a hydrogen radical generator, and an outlet for a hydrogen radical containing gas. The mini-reactor is constructed and arranged to create a local mini-environment comprising hydrogen radicals to treat the sensing surface.