The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Aug. 08, 2012
Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films
Applicants:
Rajesh Odedra, Victoria, CA;
Neil Boag, Mytholmroyd W. Yorkshire, GB;
Jeff Anthis, Haverhill, MA (US);
Ravi Kanjolia, North Andover, MA (US);
Mark Saly, North Andover, MA (US);
Inventors:
Rajesh Odedra, Victoria, CA;
Neil Boag, Mytholmroyd W. Yorkshire, GB;
Jeff Anthis, Haverhill, MA (US);
Ravi Kanjolia, North Andover, MA (US);
Mark Saly, North Andover, MA (US);
Assignee:
Sigma-Aldrich Co. LLC, St. Louis, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 13/00 (2006.01); C23C 16/00 (2006.01); C23C 16/18 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
C07F 13/00 (2013.01); C23C 16/18 (2013.01); C23C 16/40 (2013.01); C23C 16/45553 (2013.01); H01L 21/02142 (2013.01); H01L 21/02175 (2013.01); H01L 21/02271 (2013.01); H01L 21/0228 (2013.01); H01L 21/28562 (2013.01); H01L 21/76841 (2013.01);
Abstract
Organometallic complexes and use thereof in thin film deposition, such as CVD and ALD are provided herein. The organometallic complexes are (alkyl-substituted η-allyl)(carbonyl)metal complexes.