The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Mar. 17, 2010
Applicants:
Petra Hetzer, Dresden, DE;
Matthias Schaller, Moritzburg, DE;
Dmytro Chumakov, Dresden, DE;
Inventors:
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/04 (2006.01); G01N 1/02 (2006.01); G01N 15/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 1/02 (2013.01); G01N 2001/028 (2013.01); G01N 2015/0038 (2013.01); H01L 22/12 (2013.01);
Abstract
During the fabrication of microstructure devices, such as integrated circuits, particles may be analyzed by displacing or removing the particles from the device surface and subsequently performing an analysis process. Consequently, a well-defined measurement environment may be established after removal of the particles, which may be accomplished on the basis of nanoprobes and the like. Hence, even critical surface areas may be monitored with respect to contamination and the like on the basis of well-established analysis techniques.