The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2014
Filed:
Aug. 01, 2012
Daniel Wack, Fredericksburg, VA (US);
Daimian Wang, Fremont, CA (US);
Karl R. Umstadter, Livermore, CA (US);
Ed MA, Alameda, CA (US);
Frank Chilese, San Ramon, CA (US);
Daniel Wack, Fredericksburg, VA (US);
Daimian Wang, Fremont, CA (US);
Karl R. Umstadter, Livermore, CA (US);
Ed Ma, Alameda, CA (US);
Frank Chilese, San Ramon, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present disclosure is directed to an illumination system. The illumination system may include a base member rotatable about a rotation axis and a plurality of mirrors disposed on an outer surface of the base member along a perimeter of the base member. The mirrors may be oriented at a predetermined angle. The illumination system also includes at least two illumination sources. Each of the mirrors of the first plurality of mirrors is configured to receive radiation from the first illumination source at a first portion of each mirror at a first time. The mirror is configured to reflect the radiation to an optical path. Each of the mirrors is further configured to receive radiation from the second illumination source at a second portion of the mirror at a second time. The mirrors reflect the radiation from the second illumination source to the common optical path.