The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2014
Filed:
Aug. 31, 2011
Fen Chen, Williston, VT (US);
Roger A. Dufresne, Fairfax, VT (US);
Kai D. Feng, Hopewell Junction, NY (US);
Richard J. St-pierre, Essex Junction, VT (US);
Fen Chen, Williston, VT (US);
Roger A. Dufresne, Fairfax, VT (US);
Kai D. Feng, Hopewell Junction, NY (US);
Richard J. St-Pierre, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A testing structure, system and method for monitoring electro-migration (EM) performance. A system is described that includes an array of testing structures, wherein each testing structure includes: an EM resistor having four point resistive measurement, wherein a first and second terminals provide current input and a third and fourth terminals provide a voltage measurement; a first transistor coupled to a first terminal of the EM resistor for supplying a test current; the voltage measurement obtained from a pair of switching transistors whose gates are controlled by a selection switch and whose drains are utilized to provide a voltage measurement across the third and fourth terminals. Also included is a decoder for selectively activating the selection switch for one of the array of testing structures; and a pair of outputs for outputting the voltage measurement of a selected testing structure.