The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Sep. 13, 2011
Alexander I. Ershov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.