The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Mar. 17, 2008
Tadashi Obikane, Nirasaki, JP;
Tadashi Obikane, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An inspection apparatus includes an inspection chamber in which low-temperature inspection of an inspection object is performed; and a transfer chamber including therein a transfer device. The transfer device includes a transfer arm for transferring the inspection object to the inspection chamber; an arm-receiving compartment having a gateway via which the transfer arm is moved into or out of the arm-receiving compartment; and a gas supply means having a first and a second supply part for supplying a low-dew-point gas to the arm-receiving compartment from different locations. Herein, the first supply part is configured to supply the low-dew-point gas toward the inspection object introduced into the arm-receiving compartment by the transfer arm.