Interdigitated capacitors with a zero quadratic voltage coefficient of capacitance or zero linear temperature coefficient of capacitance

Abstract

Disclosed are an interdigitated capacitor and an interdigitated vertical native capacitor, each having a relatively low (e.g., zero) net coefficient of capacitance with respect to a specific parameter. For example, the capacitors can have a zero net linear temperature coefficient of capacitance (T) to limit capacitance variation as a function of temperature or a zero net quadratic voltage coefficient of capacitance (V) to limit capacitance variation as a function of voltage. In any case, each capacitor can incorporate at least two different plate dielectrics having opposite polarity coefficients of capacitance with respect to the specific parameter due to the types of dielectric materials used and their respective thicknesses. As a result, the different dielectric plates will have opposite effects on the capacitance of the capacitor that cancel each other out such that the capacitor has a zero net coefficient of capacitance with respect to specific parameter.