The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Aug. 10, 2010
Sven Antoin Johan Hol, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Antonius Franciscus Johannes DE Groot, Someren, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Geert-jan Petrus Naaijkens, Eindhoven, NL;
Marijn Kessels, Geldrop, NL;
Daniël Godfried Emma Hobbelen, Amsterdam, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Antonius Franciscus Johannes De Groot, Someren, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Geert-Jan Petrus Naaijkens, Eindhoven, NL;
Marijn Kessels, Geldrop, NL;
Daniël Godfried Emma Hobbelen, Amsterdam, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for positioning a substage, supported by a main stage, relative to a reference object, the substage moveable in a direction between a first and second position relative to the main stage. The method includes positioning the first stage using a passive force system that is activated by positioning the main stage. The passive force system includes two magnet systems, each magnet system being configured to apply a force in the direction to the first stage with respect to the second stage in a non-contact manner, the forces resulting in a resultant force applied to the first stage in the direction by the passive force system. A magnitude and/or a direction of the resultant force depends on the position of the first stage relative to the second stage, and the first stage has a zero-force position between the first and second position in which the resultant force is zero.