The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Nov. 18, 2013
Applicant:
Dcg Systems, Inc., Fremont, CA (US);
Inventors:
Vladimir A. Ukraintsev, Allen, TX (US);
Richard Stallcup, Frisco, TX (US);
Sergiy Pryadkin, Plano, TX (US);
Mike Berkmyre, Allen, TX (US);
John Sanders, Coppell, TX (US);
Assignee:
DCG Systems, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/28 (2006.01); G02B 27/32 (2006.01); G02B 21/00 (2006.01); G01Q 60/00 (2010.01); G01Q 10/00 (2010.01); G01Q 60/38 (2010.01); G01Q 60/48 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/00 (2013.01); G01Q 60/00 (2013.01); G01Q 60/38 (2013.01); G01Q 60/48 (2013.01);
Abstract
A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.