The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Feb. 05, 2010
Yukiteru Sekita, Kyoto, JP;
Kazuma Kubota, Kyoto, JP;
Tsuyoshi Moriya, Tokyo, JP;
Eiichi Sugawara, Nirasaki, JP;
Yukiteru Sekita, Kyoto, JP;
Kazuma Kubota, Kyoto, JP;
Tsuyoshi Moriya, Tokyo, JP;
Eiichi Sugawara, Nirasaki, JP;
Shimadzu Corporation, Kyoto-shi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A turbomolecular pump includes: a rotor () formed with rotating blades () in a plurality of stages, and rotating at high speed; a plurality of fixed blades () arranged along axial direction of the pump so as to alternate with respect to the rotating blades (); a pump housing () containing the rotating blades () and the fixed blades (), and formed with an inlet opening (); a circular disk (), provided close to the inlet opening of the rotor (), and arranged so as to oppose a surface of the rotor () radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (), disposed between the inlet opening () and the rotor (), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure ().