The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Jul. 08, 2010
Makoto Ono, Yokohama, JP;
Yohei Minekawa, Fujisawa, JP;
Junko Konishi, Yokohama, JP;
Takehiro Hirai, Ushiku, JP;
Yuya Isomae, Hitachinaka, JP;
Makoto Ono, Yokohama, JP;
Yohei Minekawa, Fujisawa, JP;
Junko Konishi, Yokohama, JP;
Takehiro Hirai, Ushiku, JP;
Yuya Isomae, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device () for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device () for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit ().