The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Jul. 07, 2011
Applicants:
Niyaz Khusnatdinov, Round Rock, TX (US);
Dwayne L. Labrake, Cedar Park, TX (US);
Inventors:
Niyaz Khusnatdinov, Round Rock, TX (US);
Dwayne L. LaBrake, Cedar Park, TX (US);
Assignees:
Canon Nanotechnologies, Inc., Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/956 (2006.01); G01N 21/94 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G01N 21/94 (2013.01); G01N 21/956 (2013.01); G01N 21/47 (2013.01); G01N 21/00 (2013.01); Y10S 977/887 (2013.01);
Abstract
Detection of periodically repeating nanovoids is indicative of levels of substrate contamination and may aid in reduction of contaminants on substrates. Systems and methods for detecting nanovoids, in addition to, systems and methods for cleaning and/or maintaining cleanliness of substrates are described.