The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Sep. 08, 2009
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Sandra Van Der Graaf, 's-Hertogenbosch, NL;
Henricus Jozef Castelijns, Bladel, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Sandra Van Der Graaf, 's-Hertogenbosch, NL;
Henricus Jozef Castelijns, Bladel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is disclosed in which a specific coating is applied to a specific surface. The coating is made from at least 99 wt % of at least one of the following: a transition metal oxide; a poor metal oxide, sulfide or selenide; a compound with the formula ATiOwhere A is an element from Group 2 of the Periodic Table; or TiOdoped with a metal from Group 3, 5 or 7 of the Periodic Table, wherein the coating is less than or equal to 49 nm thick.