The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Oct. 26, 2011
Fen Chen, Williston, VT (US);
Roger A. Dufresne, Essex Junction, VT (US);
Kai D. Feng, Hopewell Junction, NY (US);
Richard J. St-pierre, Essex Junction, VT (US);
Fen Chen, Williston, VT (US);
Roger A. Dufresne, Essex Junction, VT (US);
Kai D. Feng, Hopewell Junction, NY (US);
Richard J. St-Pierre, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An integrated circuit, testing structure, and method for monitoring electro-migration (EM) performance. A method is described that includes method for measuring on-chip electro-migration (EM) performance, including: providing a first on-chip sensor continuously powered with a stress current; providing a second on-chip sensor that is powered only during measurement cycles with a nominal current; obtaining a first resistance measurement from the first on-chip sensor and a second resistance measurement from the second on-chip sensor during each of a series of measurement cycles; and processing the first and second resistance measurements.