The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Apr. 21, 2010
John Valcore, Jr., Rochester, NY (US);
Yufeng Han, Rochester, NY (US);
Jonathan Smyka, Rochester, NY (US);
Salvatore Polizzo, Henrietta, NY (US);
Aaron T. Radomski, Wyoming, NY (US);
John Valcore, Jr., Rochester, NY (US);
Yufeng Han, Rochester, NY (US);
Jonathan Smyka, Rochester, NY (US);
Salvatore Polizzo, Henrietta, NY (US);
Aaron T. Radomski, Wyoming, NY (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.