The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2014

Filed:

Nov. 14, 2012
Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Satoshi Nakazawa, Osaka, JP;

Tetsuzo Ueda, Osaka, JP;

Yoshiharu Anda, Osaka, JP;

Naohiro Tsurumi, Toyama, JP;

Ryo Kajitani, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01); H01L 29/423 (2006.01); H01L 29/417 (2006.01); H01L 29/40 (2006.01); H01L 29/47 (2006.01); H01L 29/20 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78 (2013.01); H01L 29/475 (2013.01); H01L 29/66462 (2013.01); H01L 29/2003 (2013.01); H01L 29/7787 (2013.01); H01L 29/42316 (2013.01); H01L 29/41775 (2013.01); H01L 29/402 (2013.01); H01L 29/0891 (2013.01);
Abstract

A field effect transistor includes a nitride semiconductor multilayer structure formed on a substrate, a source electrode, a drain electrode, a gate electrode, an insulating film formed on the nitride semiconductor multilayer structure, and a field plate formed on and in contact with the insulating film, and having an end located between the gate electrode and the drain electrode. The insulating film includes a first film, and a second film having a dielectric breakdown voltage lower than that of the first film, and a thin film portion formed between the gate electrode and the drain electrode is formed in the insulating film. The field plate covers the thin film portion, and is connected to the source electrode in an opening.


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