The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Sep. 16, 2013
Mapper Lithography Ip B.v., Delft, NL;
Marco Jan Jaco Wieland, Delft, NL;
Bert Jan Kampherbeek, Delft, NL;
Alexander Hendrik Vincent Van Veen, Rotterdam, NL;
Pieter Kruit, Delft, NL;
Stijn Willem Herman Karel Steenbrink, Utrecht, NL;
Mapper Lithography IP B.V., Delft, NL;
Abstract
A projection lens arrangement for a charged particle multi-beamlet system, the projection lens arrangement including one or more plates and one or more arrays of projection lenses. Each plate has an array of apertures formed in it, with projection lenses formed at the locations of the apertures. The arrays of projection lenses form an array of projection lens systems, each projection lens system comprising one or more of the projection lenses formed at corresponding points of the one or more arrays of projection lenses.