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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8889235 B1

PDFFull Text
Date of Patent:
Nov. 18, 2014

Filed:

May. 03, 2010

Dielectric barrier deposition using nitrogen containing precursor

Applicants:

Anupama Mallikarjunan, Macungie, PA (US);

Raymond Nicholas Vrtis, Orefield, PA (US);

Laura M. Matz, Allentown, PA (US);

Mark Leonard O'neill, San Marcos, CA (US);

Andrew David Johnson, Doylestown, PA (US);

Manchao Xiao, San Diego, CA (US);

Inventors:

Anupama Mallikarjunan, Macungie, PA (US);

Raymond Nicholas Vrtis, Orefield, PA (US);

Laura M. Matz, Allentown, PA (US);

Mark Leonard O'Neill, San Marcos, CA (US);

Andrew David Johnson, Doylestown, PA (US);

Manchao Xiao, San Diego, CA (US);

Assignee:

Air Products and Chemicals, Inc., Allentown, PA (US);

Attorneys:

Rosaleen P. Morris-Oskanian

Joseph D. Rossi

Primary Examiner:

Elizabeth Burkhart

Int. Cl.
CPC ...
H05H 1/24 (2006.01); H01L 21/02 (2006.01); H01L 21/314 (2006.01); H01L 21/768 (2006.01); C23C 16/36 (2006.01);
U.S. Cl.
CPC ...
C23C 16/36 (2013.01); H01L 21/02211 (2013.01); H01L 21/3148 (2013.01); H01L 21/76834 (2013.01); H01L 21/76831 (2013.01); H01L 21/02167 (2013.01); H01L 21/02274 (2013.01);
Abstract

A process for forming a silicon carbonitride barrier dielectric film between a dielectric film and a metal interconnect of an integrated circuit substrate, comprising the steps of;

Find Patent Forward Citations

Mallikarjunan, Anupama. (2014). Dielectric barrier deposition using nitrogen containing precursor (U.S. Patent No. 8889235). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8889235

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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