The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Sep. 25, 2012
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Thomas G. Miller, Portland, OR (US);
Jason Arjavac, Hillsboro, OR (US);
Damon Heer, Beaverton, OR (US);
Michael Strauss, Hillsboro, OR (US);
Gerardus Nicolaas Anne van Veen, Waalre, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/28 (2006.01); H01J 37/02 (2006.01); H01J 37/305 (2006.01); H01J 37/20 (2006.01); G01N 1/32 (2006.01);
U.S. Cl.
CPC ...
G01N 1/28 (2013.01); H01J 37/3056 (2013.01); H01J 37/02 (2013.01); H01J 37/20 (2013.01); G01N 1/32 (2013.01);
Abstract
A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region of interest in the lamella can be placed over a hole in a carbon film providing minimal optical and spectral interference from the carbon film during TEM, SEM, or STEM procedure of chemical analysis.