The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Feb. 18, 2014
Mentor Graphics Corporation, Wilsonville, OR (US);
George P. Lippincott, Lake Oswego, OR (US);
Junjiang Lei, Fremont, CA (US);
Le Hong, West Linn, OR (US);
Mentor Graphics Corporation, Wilsonville, OR (US);
Abstract
Aspects of the invention relate to techniques for applying edge fragment correlation information to optical proximity correction. Conventional edge adjustment values for the edge fragments are first derived from edge placement error values. Neighbor-aware edge adjustment values for the edge fragments are then computed based on the edge placement error values, the conventional edge adjustment values and edge fragment correlation information. The computation comprises: calculating pseudo edge placement error values by subtracting neighboring edge movement contribution values from the edge placement error values and calculating the neighbor-aware edge adjustment values based on the pseudo edge placement error values. The computed neighbor-aware edge adjustment values are combined with conventional edge adjustment values and the edge fragments are adjusted accordingly. The process may be repeated for a number of times.