The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Apr. 13, 2012
Applicants:
Ki Hun Lee, Seoul, KR;
Heung Hyun Shin, Seoul, KR;
Heui Jae Pahk, Seoul, KR;
Inventors:
Assignee:
Snu Precision Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01J 3/45 (2006.01); G01B 9/021 (2006.01); G01B 11/02 (2006.01); H01L 21/66 (2006.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); H01L 22/12 (2013.01); G01B 2210/56 (2013.01);
Abstract
Provided herein is a TSV measuring interferometer that uses a variable field stop that adjusts such that a light is focused at an inlet and at a bottom surface of a TSV when measuring a diameter and depth of the TSV, thereby reducing a measurement time and result data, the interferometer also using a telecentric lens that adjusts the light injected into the TSV to be a straight line, so as to obtain a sufficient amount of light reaching the bottom surface to improve the accuracy of measurement even in a TSV having a large aspect ratio.