The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Sep. 12, 2012
Applicant:
Katsuhiko Nakai, Yamaguchi, JP;
Inventor:
Katsuhiko Nakai, Yamaguchi, JP;
Assignee:
Siltronic AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/72 (2006.01); C30B 15/04 (2006.01); C30B 29/06 (2006.01);
U.S. Cl.
CPC ...
C30B 29/06 (2013.01); C30B 15/04 (2013.01);
Abstract
Silicon wafers having a resistivity >6 Ωcm and axially uniform resistivity are grown by the Czochralski method from a melt containing boron as the main dopant, an n-type first sub-dopant with a segregation coefficient lower than boron, and a p-type second sub-dopant with a segregation coefficient lower than the first sub-dopant.