The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Oct. 08, 2008
Arie Jeffrey Den Boef, Waalre, NL;
Hugo Augustinus Joseph Cramer, Eindhoven, NL;
Jouke Krist, Eindhoven, NL;
Willem Jan Grootjans, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Hugo Augustinus Joseph Cramer, Eindhoven, NL;
Jouke Krist, Eindhoven, NL;
Willem Jan Grootjans, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A set of parameters used in a model of a spectrometer includes free parameters and fixed parameters. A first set of values for the parameters is set and the model is used to generate a first spectrum. A value of one of the fixed parameters is changed and a second spectrum is generated. An inverse of the model of the spectrometer is then applied to the second spectrum to generate a set of values for the parameters, the values being the same as the first set of values except for one or more of the free parameters. If the free parameter has significantly changed the fixed parameter is designated a free parameter.