The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Mar. 18, 2010
Gosse Charles DE Vries, Veldhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Marinus Johannes Maria Van Dam, Venlo, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Fidelus Adrianus Boon, Bavel, NL;
Hermanus Johannes Maria Kreuwel, Schijndel, NL;
Gosse Charles De Vries, Veldhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Marinus Johannes Maria Van Dam, Venlo, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Fidelus Adrianus Boon, Bavel, NL;
Hermanus Johannes Maria Kreuwel, Schijndel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.