The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Feb. 27, 2012
Christopher D. Manack, Lewisville, TX (US);
Frank Stepniak, Allen, TX (US);
Sreenivasan K. Koduri, Allen, TX (US);
Christopher D. Manack, Lewisville, TX (US);
Frank Stepniak, Allen, TX (US);
Sreenivasan K. Koduri, Allen, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An embedded micro-electro-mechanical system (MEMS) () comprising a semiconductor chip () embedded in an insulating board (), the chip having a cavity () including a radiation sensor MEMS (), the opening () of the cavity at the chip surface covered by a plate () transmissive to the radiation () sensed by the MEMS. The plate surface remote from the cavity having a bare central area, to be exposed to the radiation sensed by the MEMS in the cavity, and a peripheral area covered by a metal film () touching the plate surface and a layer () of adhesive stacked on the metal film.