The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Mar. 17, 2014
Hitachi High-technologies Corporation, Tokyo, JP;
Noritsugu Takahashi, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Manabu Yano, Hitachiomiya, JP;
Hirohiko Kitsuki, Hitachinaka, JP;
Kazunari Asao, Tokai, JP;
Tomoyasu Shojo, Saitama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A charged-particle-beam device is characterized in having a control value for an aligner coil () being determined by: a coil current and an electrode applied-voltage at a control value for objectives (), which is an electromagnetic-field superposition lens; a control value for image-shift coils (); and the acceleration voltage of the charged-particle-beam. By doing this, it has become possible to avoid image disturbances that occur on images to be displayed at boundaries between charged areas and non-charged areas, and provide a charged-particle-beam device that obtains clear images without any unevenness in brightness.