The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Dec. 22, 2011
Applicants:
Bob Kong, Newark, CA (US);
Tony Chiang, Campbell, CA (US);
Chi-i Lang, Cupertino, CA (US);
Zhi-wen Sun, San Jose, CA (US);
Jinhong Tong, Santa Clara, CA (US);
Inventors:
Bob Kong, Newark, CA (US);
Tony Chiang, Campbell, CA (US);
Chi-I Lang, Cupertino, CA (US);
Zhi-Wen Sun, San Jose, CA (US);
Jinhong Tong, Santa Clara, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); C23C 18/54 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); C23C 18/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02068 (2013.01); C23C 18/54 (2013.01); H01L 21/288 (2013.01); H01L 21/76874 (2013.01); H01L 21/76852 (2013.01); C23C 18/1651 (2013.01);
Abstract
Embodiments of the current invention describe methods of processing a semiconductor substrate that include applying a zincating solution to the semiconductor substrate to form a zinc passivation layer on the titanium-containing layer, the zincating solution comprising a zinc salt, FeCl, and a pH adjuster.