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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8840728 B1

PDFFull Text
Date of Patent:
Sep. 23, 2014

Filed:

Jun. 21, 2010

Imprint system for performing a treatment on a template

Applicants:

Shoichi Terada, Koshi, JP;

Yoshio Kimura, Koshi, JP;

Takahiro Kitano, Koshi, JP;

Inventors:

Shoichi Terada, Koshi, JP;

Yoshio Kimura, Koshi, JP;

Takahiro Kitano, Koshi, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Posz Law Group, PLC

Primary Examiner:

Dah-Wei D Yuan

Assistant Examiner:

Karl Kurple

Int. Cl.
CPC ...
C23C 16/00 (2006.01); B05C 21/00 (2006.01); B05C 13/02 (2006.01); B05C 13/00 (2006.01); H01L 21/687 (2006.01); H01L 21/56 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01); G03F 7/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); B29C 33/58 (2006.01); B28B 7/38 (2006.01); B65B 33/00 (2006.01); B05D 3/02 (2006.01);
U.S. Cl.
CPC ...
B29C 33/58 (2013.01); H01L 21/68707 (2013.01); B05C 13/00 (2013.01); H01L 21/566 (2013.01); H01L 21/67333 (2013.01); H01L 21/6715 (2013.01); H01L 21/6719 (2013.01); G03F 7/0002 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/67207 (2013.01); H01L 21/67057 (2013.01); H01L 21/67178 (2013.01); Y10S 414/141 (2013.01);
Abstract

The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit.

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