The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2014

Filed:

Nov. 15, 2012
Applicant:

Globalfoundries Inc., Grand Cayman, KY (US);

Inventors:

Jan Hoentschel, Dresden, DE;

Stefan Flachowsky, Dresden, DE;

Ralf Illgen, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 31/0312 (2006.01); H01L 29/16 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78 (2013.01); H01L 29/1608 (2013.01);
Abstract

A method comprises providing a semiconductor structure comprising a substrate, an electrically insulating layer on the substrate and a semiconductor feature on the electrically insulating layer. A gate structure is formed on the semiconductor feature. An in situ doped semiconductor material is deposited on portions of the semiconductor feature adjacent the gate structure. Dopant is diffused from the in situ doped semiconductor material into the portions of the semiconductor feature adjacent the gate structure, the diffusion of the dopant into the portions of the semiconductor feature adjacent the gate structure forming doped source and drain regions in the semiconductor feature.


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