The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Feb. 29, 2012
Koji Yoshii, Oshu, JP;
Tatsuya Yamaguchi, Sapporo, JP;
Wenling Wang, Oshu, JP;
Takanori Saito, Oshu, JP;
Koji Yoshii, Oshu, JP;
Tatsuya Yamaguchi, Sapporo, JP;
Wenling Wang, Oshu, JP;
Takanori Saito, Oshu, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A control unit can select a large-number control zone model in which the number of control zones, which are independently controlled, is large, and a small-number control zone model in which the number of control zones, which are independently controlled, is small. When a temperature is increased or decreased, the control unit can select the small-number control zone model so as to control, based on signals from temperature sensors of the respective control zones C. . . Cwhose number is small, heaters located on the respective control zones C. . . C. When a temperature is stabilized, the control unit can select the large-number control zone model so as to control, based on signals from the temperature sensors of the respective control zones C. . . Cwhose number is large, the heaters located on the respective control zones C. . . C.