The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2014

Filed:

Feb. 11, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Andres Bryant, Burlington, VT (US);

Oki Gunawan, Fair Lawn, NJ (US);

Shih-Hsien Lo, Mount Kisco, NY (US);

Jeffrey W. Sleight, Ridgefield, CT (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B82Y 35/00 (2011.01); B82Y 10/00 (2011.01); H01L 29/66 (2006.01); G01B 7/16 (2006.01); H01L 29/06 (2006.01); H01L 29/775 (2006.01); H01L 29/84 (2006.01); B82Y 40/00 (2011.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66477 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G01B 7/18 (2013.01); H01L 29/0665 (2013.01); G01B 7/16 (2013.01); H01L 29/045 (2013.01); H01L 29/775 (2013.01); H01L 29/66439 (2013.01); Y10S 977/724 (2013.01); Y10S 977/938 (2013.01); Y10S 977/956 (2013.01);
Abstract

Methods for sensing a mechanical stress and methods of making stress sensor integrated circuits. The sensing methods include transferring the mechanical stress from the object to one or more nanowires in a stress sensor or stress sensor circuit and permitting the nanowires to change in length in response to the mechanical stress. An electrical characteristic of the stress sensor or stress sensor circuit, which has a variation correlated with changes in the magnitude of the mechanical stress, is measured and then assessed to determine the stress magnitude. The manufacture methods include electrically connecting nanowire field effect transistors having, as channel regions, one or more nanowires of either a different crystalline orientation or a different body width for the individual nanowires so that an offset output voltage results when mechanical strain is applied to the nanowires.


Find Patent Forward Citations

Loading…