The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2014

Filed:

Mar. 09, 2012
Applicants:

Hideo Eto, Mie, JP;

Makoto Saito, Mie, JP;

Nobuyasu Nishiyama, Mie, JP;

Inventors:

Hideo Eto, Mie, JP;

Makoto Saito, Mie, JP;

Nobuyasu Nishiyama, Mie, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 31/02 (2006.01); H01L 21/67 (2006.01); G05D 16/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); G05D 16/202 (2013.01);
Abstract

According to one embodiment, there is provided pressure controlling apparatus including a detecting unit, an exhaust pipe, a regulating valve, and a pressure controlling unit. The regulating valve includes a valve port, a changing unit, and a slide valve. The valve port is communicated with the exhaust pipe. The changing unit changes a shape of the valve port to a different shape whose center is located near the central axis of the exhaust pipe. The slide valve regulates an opening degree of the valve port changed by the changing unit. The pressure controlling unit controls changing of a shape of the valve port by the changing unit and regulation of an opening degree of the valve port by the slide valve.


Find Patent Forward Citations

Loading…