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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8829436 B1

PDFFull Text
Date of Patent:
Sep. 09, 2014

Filed:

Dec. 23, 2013

Phase plate and method of fabricating same

Applicant:

Jeol Ltd., Tokyo, JP;

Inventors:

Hirofumi Iijima, Tokyo, JP;

Yuji Konyuba, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:

The Webb Law Firm

Primary Examiner:

Jack Berman

Assistant Examiner:

Meenakshi Sahu

Int. Cl.
CPC ...
G01N 23/00 (2006.01); G21K 7/00 (2006.01); H01J 37/26 (2006.01); H01J 37/04 (2006.01); G03F 7/00 (2006.01); H01J 37/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/001 (2013.01); H01J 37/26 (2013.01); H01J 37/04 (2013.01); H01J 2237/2614 (2013.01); H01J 37/02 (2013.01);
Abstract

A method of fabricating a phase plate, for use in a transmission electron microscope, with simple process steps is offered. The method includes a step (S) of forming a first layer on a substrate, a step (S) of patterning the first layer to form through-holes extending through the first layer, a step (S) of etching the surface of the substrate opposite to the surface on which the first layer is formed to form an opening which is in communication with the through-holes and which exposes the first layer, and a step (S) of forming a second layer on the first layer.

Find Patent Forward Citations

Iijima, Hirofumi. (2014). Phase plate and method of fabricating same (U.S. Patent No. 8829436). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8829436

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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