The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Dec. 23, 2013
Applicant:
Jeol Ltd., Tokyo, JP;
Inventors:
Hirofumi Iijima, Tokyo, JP;
Yuji Konyuba, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01); G21K 7/00 (2006.01); H01J 37/26 (2006.01); H01J 37/04 (2006.01); G03F 7/00 (2006.01); H01J 37/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/001 (2013.01); H01J 37/26 (2013.01); H01J 37/04 (2013.01); H01J 2237/2614 (2013.01); H01J 37/02 (2013.01);
Abstract
A method of fabricating a phase plate, for use in a transmission electron microscope, with simple process steps is offered. The method includes a step (S) of forming a first layer on a substrate, a step (S) of patterning the first layer to form through-holes extending through the first layer, a step (S) of etching the surface of the substrate opposite to the surface on which the first layer is formed to form an opening which is in communication with the through-holes and which exposes the first layer, and a step (S) of forming a second layer on the first layer.