The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Sep. 08, 2010
Yuya Inoue, Chigasaki, JP;
Tamotsu Tanifuji, Chigasaki, JP;
Hisato Tanaka, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Kuniyoshi Sekine, Hidaka, JP;
Yuya Inoue, Chigasaki, JP;
Tamotsu Tanifuji, Chigasaki, JP;
Hisato Tanaka, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Kuniyoshi Sekine, Hidaka, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
A substrate transfer processing apparatus capable of processing a substrate at high speed is provided. A mounting table on which a substrate is mounted includes a plate-shaped main body and a recessed part formed in a rear surface of the plate-shaped main body. Since the mounting table is lightweight as compared to the mounting table before the recessed part is formed therein, the load on a motor is small and the running cost is low even when the mounting table is moved at high speed. Because the plate-shaped main body is made of granite, the mounting surface can be made flat and smooth by polishing. Since the mounting surface is flat and smooth, the accuracy in positioning the substrate is high.