The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Jun. 27, 2011
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
Norbertus Josephus Martinus Van Den Nieuwelaar, Tilburg, NL;
Marcel François Heertjes, Best, NL;
Joost Jozef Hendrik Gielis, Berchem, BE;
Ferdinand Bernardus Johannus Wilhelmus Maria Hendriks, Wijchen, NL;
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
Norbertus Josephus Martinus Van Den Nieuwelaar, Tilburg, NL;
Marcel François Heertjes, Best, NL;
Joost Jozef Hendrik Gielis, Berchem, BE;
Ferdinand Bernardus Johannus Wilhelmus Maria Hendriks, Wijchen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A position control system to control the position of a movable object, including a position measurement system configured to determine an actual position related quantity of the movable object; a set-point generator to provide a position related set-point signal of the movable object; a comparator to provide an error signal on the basis of a comparison of the actual position related quantity and the position related set-point signal, a controller to provide a control signal on the basis of the error signal, a feed-forward device to provide a feed-forward signal on the basis of the position related set-point signal, and one or more actuators to act on the movable object on the basis of the control signal and the feed-forward signal, wherein the feed-forward device includes a disturbance force correction table including estimations of disturbance forces exerted on the movable object in dependence of a position of the movable object.