The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Dec. 17, 2012
Erdem Arkun, San Carlos, CA (US);
Michael Lebby, Apache Junction, AZ (US);
Andrew Clark, Los Altos, CA;
Rytis Dargis, Fremont, CA (US);
Erdem Arkun, San Carlos, CA (US);
Michael Lebby, Apache Junction, AZ (US);
Andrew Clark, Los Altos, CA;
Rytis Dargis, Fremont, CA (US);
Translucent, Inc., Palo Alto, CA (US);
Abstract
A method of forming a template on a silicon substrate includes providing a single crystal silicon substrate. The method further includes epitaxially depositing a layer of rare earth oxide on the surface of the silicon substrate. The rare earth oxide being substantially crystal lattice matched to the surface of the silicon substrate. The method further includes forming an aluminum oxide layer on the rare earth oxide, the aluminum oxide being substantially crystal lattice matched to the surface of the rare earth oxide and epitaxially depositing a layer of aluminum nitride (AlN) on the aluminum oxide layer substantially crystal lattice matched to the surface of the aluminum oxide.