The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2014

Filed:

Jan. 23, 2013
Applicant:

United Microelectronics Corp., Hsinchu, TW;

Inventors:

Tsung-Han Lee, Tainan, TW;

Cheng-Tung Huang, Kaohsiung, TW;

Yi-Han Ye, Tainan, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8249 (2006.01);
U.S. Cl.
CPC ...
Abstract

Provided is a method of fabricating a MOS device including the following steps. At least one gate structure is formed on a substrate, wherein the gate structure includes a gate conductive layer and a hard mask layer disposed on the gate conductive layer. A first implant process is performed to form source and drain extension regions in the substrate, wherein the gate conductive layer is covered by the hard mask layer. A process is of removing the hard mask layer is performed to expose the surface of the gate conductive layer. A second implant process is performed to form pocket doped regions in the substrate, wherein the gate conductive layer is not covered by the hard mask layer.


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