The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2014

Filed:

Feb. 23, 2010
Applicants:

Reza A. Pagaila, Singapore, SG;

Yaojian Lin, Singapore, SG;

Seung Uk Yoon, Singapore, SG;

Inventors:

Reza A. Pagaila, Singapore, SG;

Yaojian Lin, Singapore, SG;

Seung Uk Yoon, Singapore, SG;

Assignee:

STATS ChipPAC, Ltd., Singapore, SG;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/337 (2006.01); H01L 23/538 (2006.01); H01L 23/48 (2006.01); H01L 25/10 (2006.01); H01L 21/768 (2006.01); H01L 23/31 (2006.01); H01L 21/56 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5389 (2013.01); H01L 2924/014 (2013.01); H01L 2924/01078 (2013.01); H01L 2924/09701 (2013.01); H01L 2924/01046 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/01024 (2013.01); H01L 2924/01073 (2013.01); H01L 2225/1041 (2013.01); H01L 2924/01079 (2013.01); H01L 2924/19041 (2013.01); H01L 2224/73265 (2013.01); H01L 2224/97 (2013.01); H01L 24/48 (2013.01); H01L 2924/01074 (2013.01); H01L 2225/1035 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/04941 (2013.01); H01L 23/481 (2013.01); H01L 2924/01013 (2013.01); H01L 2924/01047 (2013.01); H01L 25/105 (2013.01); H01L 2924/01322 (2013.01); H01L 2924/01082 (2013.01); H01L 2924/13091 (2013.01); H01L 21/76898 (2013.01); H01L 24/97 (2013.01); H01L 2224/48247 (2013.01); H01L 2924/01023 (2013.01); H01L 224/01006 (2013.01); H01L 23/3128 (2013.01); H01L 2924/30105 (2013.01); H01L 2924/14 (2013.01); H01L 2924/1433 (2013.01); H01L 24/19 (2013.01); H01L 21/568 (2013.01); H01L 2225/1058 (2013.01); H01L 23/49816 (2013.01); H01L 2924/01004 (2013.01);
Abstract

A semiconductor device has a semiconductor die mounted over a carrier. An encapsulant is deposited over the semiconductor die and carrier. An insulating layer is formed over the semiconductor die and encapsulant. A plurality of first vias is formed through the insulating layer and semiconductor die while mounted to the carrier. A plurality of second vias is formed through the insulating layer and encapsulant in the same direction as the first vias while the semiconductor die is mounted to the carrier. An electrically conductive material is deposited in the first vias to form conductive TSV and in the second vias to form conductive TMV. A first interconnect structure is formed over the insulating layer and electrically connected to the TSV and TMV. The carrier is removed. A second interconnect structure is formed over the semiconductor die and encapsulant and electrically connected to the TSV and TMV.


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