The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
May. 04, 2011
Philippe Gastaldo, Pontcharra, FR;
Frederic Pernot, Saint Egreve, FR;
Olivier Piffard, Villard Bonnot, FR;
Philippe Gastaldo, Pontcharra, FR;
Frederic Pernot, Saint Egreve, FR;
Olivier Piffard, Villard Bonnot, FR;
Alatech Semiconductor, Montbonnot-Saint Martin, FR;
Abstract
Device for inspecting defects in semiconductor wafers, comprising a member for detecting surface defects using variations in the slope of a surface of the wafer, a member for detecting surface defects using variations in the light intensity reflected by a surface of the wafer, at a plurality of points, a member for detecting light intensity scattered by the surface of the wafer, a light source, and a detecting and classifying mechanism connected upstream of said detecting members.