The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Jul. 21, 2010
Wouter Anthon Soer, Nijmegen, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
Ronald Dekker, Valkenswaard, NL;
Wouter Anthon Soer, Nijmegen, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
Ronald Dekker, Valkenswaard, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of forming a spectral purity filter having a plurality of apertures configured to transmit extreme ultraviolet radiation and suppress transmission of a second type of radiation, in which trenches are formed in a base material in a pattern corresponding to the walls to be formed between the apertures. The trenches are filled with a grid material to form walls of the grid material, and the base material is selectively removed until the grid material is exposed and forms the spaces between the walls of the grid material for the apertures.