The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Oct. 30, 2012
Applicants:
Aleksandra Kramer, Munich, DE;
Stefan Lanio, Erding, DE;
Inventors:
Aleksandra Kramer, Munich, DE;
Stefan Lanio, Erding, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 18/00 (2006.01); G21K 1/093 (2006.01);
U.S. Cl.
CPC ...
G21K 1/093 (2013.01);
Abstract
A method of compensating mechanical, magnetic and/or electrostatic inaccuracies in a scanning charged particle beam device is described. The method includes an alignment procedure, wherein the following steps are conducted: compensating 4-fold astigmatism with an element having at least 8-pole compensation capability, wherein the aligning and compensating steps of the alignment procedure act on a charged particle beam with beam dimensions in two orthogonal directions each of at least 50 μm and coaxially aligned with at least the element having at least the 8-pole compensation capability.