The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Jan. 07, 2013
International Business Machines Corporation, Armonk, NY (US);
Kevin S. Petrarca, Newburgh, NY (US);
Donald F. Canaperi, Averill Park, NY (US);
Mahadevaiyer Krishnan, Hopewell Junction, NY (US);
Rebecca D. Mih, Los Gatos, CA (US);
Steven Steen, Veldhoven, NL;
Henry Grabarz, Shelton, CT (US);
Michael S. Hibbs, Westford, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A reticle carrier for a polishing tool capable of accommodating a reticle includes a base plate with an obverse and reverse surfaces, a retaining ring secured to the obverse surface of the base plate forming a recess defined by the obverse surface of the rigid base plate and internal edges of the retaining ring. A reticle pad supports a reticle in the recess. The base plate and the reticle pad having an array of matching, aligned passageway holes therethrough for exhaustion of air from space between the base plate and a the reticle and for supply of air to that space so a vacuum can retain a the reticle in place on the reticle carrier under vacuum conditions and application of air under pressure can eject a reticle from the reticle carrier.