The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Jul. 20, 2010
Tomohisa Ohtaki, Hitachinaka, JP;
Masahiko Ajima, Hitachinaka, JP;
Sukehiro Ito, Hitachinaka, JP;
Mitsuru Onuma, Tokyo, JP;
Akira Omachi, Komae, JP;
Tomohisa Ohtaki, Hitachinaka, JP;
Masahiko Ajima, Hitachinaka, JP;
Sukehiro Ito, Hitachinaka, JP;
Mitsuru Onuma, Tokyo, JP;
Akira Omachi, Komae, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.