The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Jan. 19, 2012
Applicants:
Wai Mun Lee, Milpitas, CA (US);
Hua Cui, Castro Valley, CA (US);
Mark A. Scialdone, West Grove, PA (US);
Albert G. Anderson, Wilmington, DE (US);
Inventors:
Wai Mun Lee, Milpitas, CA (US);
Hua Cui, Castro Valley, CA (US);
Mark A. Scialdone, West Grove, PA (US);
Albert G. Anderson, Wilmington, DE (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/60 (2006.01); C11D 11/00 (2006.01); C11D 7/32 (2006.01); C11D 3/43 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0047 (2013.01); C11D 7/3209 (2013.01); C11D 3/43 (2013.01); H01L 21/02057 (2013.01);
Abstract
Semiconductor processing compositions comprising amidoxime compounds having two or more amidoxime functional groups and their use in semiconductor processing to remove photoresist, polymeric materials, etching residues and copper oxides from semiconductor substrates, particularly substrates comprising copper, low-k dielectric material, titanium nitride, and/or titanium oxynitride.