The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Aug. 12, 2010
Paul Lukas Brillhart, Pleasanton, CA (US);
Richard Fovell, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Douglas H. Burns, Saratoga, CA (US);
Kallol Bera, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Kenneth W. Cowans, Fullerton, CA (US);
William W. Cowans, Fullerton, CA (US);
Glenn W. Zubillaga, Canyon Lake, CA (US);
Isaac Millan, Anaheim, CA (US);
Paul Lukas Brillhart, Pleasanton, CA (US);
Richard Fovell, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Douglas H. Burns, Saratoga, CA (US);
Kallol Bera, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Kenneth W. Cowans, Fullerton, CA (US);
William W. Cowans, Fullerton, CA (US);
Glenn W. Zubillaga, Canyon Lake, CA (US);
Isaac Millan, Anaheim, CA (US);
BE Aerospace, Inc., Wellington, FL (US);
Abstract
A method of transferring heat from or to a workpiece support in an RF coupled plasma reactor includes placing coolant in an internal flow channel that is located inside the workpiece support and transferring heat from or to the coolant by circulating the coolant through a refrigeration loop in which the internal flow channel of the workpiece support constitutes an evaporator of the refrigeration loop. The method further includes maintaining thermal conditions of the coolant inside the evaporator within a range in which heat exchange between the workpiece support and the coolant is primarily or exclusively through the latent heat of vaporization of the coolant.