logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8797534 B1

PDFFull Text
Date of Patent:
Aug. 05, 2014

Filed:

Sep. 24, 2013

Optical system polarizer calibration

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Johannes D. de Veer, Menlo Park, CA (US);

Leonid Poslavsky, Belmont, CA (US);

G. Vera Zhuang, Santa Clara, CA (US);

Shankar Krishnan, Santa Clara, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorneys:

Luedeka Neely Group, P.C.

Rick Barnes

Primary Examiner:

Roy M Punnoose

Int. Cl.
CPC ...
G01J 4/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.

Find Patent Forward Citations

de Veer, Johannes. (2014). Optical system polarizer calibration (U.S. Patent No. 8797534). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8797534

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…