The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Mar. 01, 2011
Takahiro Nishibayashi, Minato-ku, JP;
Yasuharu Iwashita, Koshi, JP;
Takeshi Tamura, Koshi, JP;
Tatsuya Kitayama, Koshi, JP;
Takahiro Nishibayashi, Minato-ku, JP;
Yasuharu Iwashita, Koshi, JP;
Takeshi Tamura, Koshi, JP;
Tatsuya Kitayama, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A joint system includes: a transfer-in/out station capable of holding a plurality of substrates or a plurality of superposed substrates, and transferring-in/out the substrates or superposed substrates to/from a processing station; and the processing station performing predetermined processing on the substrates and joining the substrates together. The processing station includes: a surface activation apparatus activating a front surface of the substrate; a surface hydrophilizing apparatus hydrophilizing and cleaning the front surface of the substrate; a joint apparatus joining the substrates together; and a transfer region for transferring the substrate or superposed substrate to the surface activation apparatus, the surface hydrophilizing apparatus, and the joint apparatus.