The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jun. 03, 2009
Mitsuru Miyazaki, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Naoki Matsuda, Tokyo, JP;
Junji Kunisawa, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Hiroshi Sotozaki, Tokyo, JP;
Hiroyuki Shinozaki, Tokyo, JP;
Osamu Nabeya, Tokyo, JP;
Shinya Morisawa, Tokyo, JP;
Takahiro Ogawa, Tokyo, JP;
Natsuki Makino, Tochigi, JP;
Mitsuru Miyazaki, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Naoki Matsuda, Tokyo, JP;
Junji Kunisawa, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Hiroshi Sotozaki, Tokyo, JP;
Hiroyuki Shinozaki, Tokyo, JP;
Osamu Nabeya, Tokyo, JP;
Shinya Morisawa, Tokyo, JP;
Takahiro Ogawa, Tokyo, JP;
Natsuki Makino, Tochigi, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An apparatus for processing a substrate is disclosed. The apparatus includes a polishing section configured to polish a substrate, a transfer mechanism configured to transfer the substrate, and a cleaning section configured to clean and dry the polished substrate. The cleaning section has plural cleaning lines for cleaning plural substrates. The plural cleaning lines have plural cleaning modules and plural transfer robots for transferring the substrates.